TY  - BOOK
AU  - Campbell, Stephen A.
TI  - Science and engineering of microelectronic fabrication
SN  - 0195136055
U1  - 621.38152 
PY  - 0000///2
CY  - New York
PB  - Oxford University Press
KW  - Electrical & Electronics Engineering
KW  - Electronics & Communication Engg
ER  -