TY  - BOOK
AU  - Hsu, Tai-Ran
TI  - MEMS and Microsystems : Design  and Manufacture
U1  - 621.381 
PY  - 2012///
CY  - New Delhi
PB  - Tata McGraw Hill 
KW  - M.Tech. (EC)
KW  - M. Tech (VLSI)
ER  -