| 000 | 00402nam a2200133Ia 4500 | ||
|---|---|---|---|
| 020 | _a0195136055 | ||
| 082 |
_a621.38152 _bCAM |
||
| 100 | _aCampbell, Stephen A. | ||
| 245 | _aScience and engineering of microelectronic fabrication | ||
| 260 |
_aNew York _bOxford University Press _c2 |
||
| 300 | _axiv, 603p. | ||
| 650 | _aElectrical & Electronics Engineering | ||
| 650 | _aElectronics & Communication Engg. | ||
| 999 |
_c1228 _d1228 |
||