000 00432nam a2200145Ia 4500
020 _a9814126942
082 _a621.38152
_bGHA
100 _aGhandhi, Sarab K
245 _aVLSI fabrication principles silicon and gallium arsenide
260 _aSingapore
_bJohn Wiley and Sons
_c2003
300 _axxiv, 834p.
650 _aElectrical & Electronics Engineering
650 _aElectronics & Communication Engg.
650 _aM. Tech (VLSI)
999 _c2415
_d2415