000			00328nam a2200133Ia 4500
082			_a621.381 _bHSU
100			_aHsu, Tai-Ran
245			_aMEMS and Microsystems : Design and Manufacture
250			_a1st
260			_aNew Delhi _bTata McGraw Hill _c2012
300			_a436p.
650			_aM.Tech. (EC)
650			_aM. Tech (VLSI)
999			_c6689 _d6689